Design, fabrication (clean-room environment subcontracting), and characterization of MEMS chemical sensors suitable for integration into embedded systems.
1. Business idea: design, fabrication (clean-
room environment subcontracting), and
characterization of MEMS chemical
sensors suitable for integration into
embedded systems
3. Introduction
Various forces, including political, economic and social, are driving the need to
tightly couple embedded devices and sensors, e.g., microelectronic gas sensors with
established applications, such as building automation, healthcare, automotive,
energy or aerospace.
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4. Microelectronic gas sensors
Gas sensor performance parameters:
• Sensitivity: detection at ppm (particles per million) level.
• Selectivity: not affected by other gases.
• Response time: time required to take a reading (valid signal).
Different types: metal oxide (MOX) semiconductors, piezolectric, catalytic, optical
and electrochemical.
Metal oxide semiconductors are the most widely manufactured.
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5. Microelectronic gas sensors (II)
Such sensors consist of gas-sensitive metal oxide materials deposited onto
interdigitated electrodes with RTD (resistance temperature detector) and heater. The
image shows platinum interdigitated electrodes with platinum RTD and heater.
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6. Microelectronic gas sensors (III)
Microelectronic gas sensors based especially on microsystems also known as
MEMS (including sensor functions and also process or action functions) have been
the subject of increasing interest in recent years. They are made in clean-rooms.
The image shows a clean-room.
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7. Embedded systems
Likewise, over two decade ago (1991), the late Mark Weiser, chief technical officer of
Xerox PARC, described the future vision of ubiquitous computing [Weiser 91] that
is transforming our lives.
Before arriving where it is today, the Internet evolved from the first generation of
connected mainframe computers to the second generation, characterized by e-
commerce and email on PCs and servers, and on to the third generation, typified by
social connectivity applications and the vast expansion of mobile devices.
We are now on the threshold of a fourth phase in the evolution of the Internet. A
network space where billions of intelligent embedded devices will connect with
larger computing systems, and to each other, without human intervention.
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8. Embedded systems (II)
In support of this concept, John Gantz [Gantz 09] of IDC forecasts 15 billion devices
will be communicating over the network by the year 2015, as illustrated in below
figure. They will involve a massive build-out of connected devices and sensors
woven into the fabric of our lives and businesses.
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9. Business opportunity: microelectronic gas sensors
integrated into embedded systems
Integrated into embedded systems.
Numerous areas of application:
• Building automation.
• Health.
• Automotive.
• Energy.
• Aerospace.
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10. Business opportunity: microelectronic gas sensors
integrated into embedded systems (II)
The result will create new opportunities, technical challenges, and the need for new
products. A long list. Currently, these examples under development.
• A gas sensor to detect ammonia at buildings that can be interfaced to KNX
(fieldbus system) alarm system.
• Sensitive ammonia detection system in exhaled human breath using a metal
oxide-based sensor.
• Ammonia/nitrogen oxides gas sensor integration with ECU (Engine Control Unit)
for combustion process control in modern diesel engines.
• A lightweight gas analyzer applied to combined cycle plants fueled with natural
gas.
• High sensitivity and fast response gas sensor for hydrogen motors.
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11. Business opportunity: microelectronic gas sensors
integrated into embedded systems (III)
Fabrication process:
1. Preparation of a microelectronic gas sensor specification report, e.g. active
material, interdigitated electrodes, substrate, deposition technique, etc.
2. Subcontracting of a clean-room environment to fabricate sensor prototypes.
3. Structural and electrical characterization (test beds) of sensor prototypes.
4. Connection to a microcontroller and/or FPGA. Computation and communication
capabilities.
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12. Conclusions
As sensors and antennas are embeddable in things around us, a new era of physical
Internet begins. The revolution is brought by economies of scale and millions of
consumers.
The result will create new opportunities, technical challenges, and the need for new
products. Currently, under this initiative some products will be developed.
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13. Bibliographic references
[Gantz 09] J. Gantz. “The Embedded Internet: Methodology and Findings”. IDC,
January 2009.
[Weiser 91] M. Weiser. “The Computer for the 21st Century”. Scientific American,
September 1991.
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14. Questions?
Send to info at Ikersens (commercial name, accepted for the Spanish patent and
trademark office).
info@ikersens.com
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